JEL SCR3160CSN
3-Axis Cylindrical Coordinate Clean Robot
Peculiarity
Model Name ： SCR3160CSN
Environment ： Clean room atmosphere
Arm ： Single arm
Operating Range ： 340mm (3rd joint center)
Vertical Stroke ： 200mm / 300mm / 400mm / 450mm / 500mm
Payload Capacity ： 3kg (calculated for the arm 3rd joint)
List of Product Model
Product Model Vertical Stroke
SCR3160CSN-200-CM 200mm
SCR3160CSN-300-CM 300mm
SCR3160CSN-400-CM 400mm
SCR3160CSN-450-CM 450mm
SCR3160CSN-500-CM 500mm
Characteristics
New type of 3-axis cylindrical coordinate type single-arm clean robot
For handling wafers from 2 inch to 300mm with low-cost, high-speed handling, and no step-out error
High reliability: Closed-loop control achieves no step-out error under rapid load change or acceleration.
Reduced origin search time: By absolute encoder
Equipped with the batteryless multi-rotation absolute sensor
Robot replacement is available: Compatible with conventional model (installation/performance)
High rigidity: Payload capacity of 3kg (calculated for the arm 3rd joint/including wrist-block, end-effector, and wafer)
Arm lineup: 100mm, 130mm, 160mm, 200mm
Base or flange mounting type is selectable according to the customer’s system layout.
Bernoulli end-effector is available (option)